The role of microscopy in semiconductor failure analysis
Author(s)
Bibliographic Information
The role of microscopy in semiconductor failure analysis
（Microscopy handbooks, 25）（Oxford science publications）
Oxford University Press : Royal Microscopical Society, 1992
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Note
Includes bibliographical references (p. [98]-101) and index
Description and Table of Contents
Description
This handbook describes the applications of microscopy to semiconductor failure analysis, and should be a useful practical guide for all those working in the field. The basic principles of each type of microscopy are explained, and each is illustrated with case histories and micrographs of many failure mechanisms.
Table of Contents
- Rationale and methodology of failure analysis
- primary instruments and their applications
- microscopes of the future
- choosing the appropriate microscopy technique(s).
by "Nielsen BookData"