IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop : ASMC '92 proceedings, September 30-October 1, 1992, Cambridge, Massachusetts
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IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop : ASMC '92 proceedings, September 30-October 1, 1992, Cambridge, Massachusetts
Additional copies of this proceedings may be purchased from: IEEE Service Center, c1992
- : soft.
- : case.
- : micro.
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92CH31823
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Includes bibliographical references
"IEEE catalog number 92CH3182-3"--T.p. verso
