MicroProcess 91 : proceedings of the 1991 International MicroProcess Conference, July 15-18, 1991, Kanazawa, Japan

Author(s)

• 難波, 進 ナンバ, ススム
• Tsurushima, T.
• 応用物理学会 オウヨウ ブツリ ガッカイ
• American Vacuum Society
• IEEE Electron Devices Society

Bibliographic Information

MicroProcess 91 : proceedings of the 1991 International MicroProcess Conference, July 15-18, 1991, Kanazawa, Japan

edited by S. Namba, T. Tsurushima

（JJAP series, 5）

Publication Office, Japanese Journal of Applied Physics, 1991

Note

"Sponspred by The Japan Society of Applied Physics (JSAP), In cooperation with American Vacuum Society (AVS), IEEE Electron Devices Society (IEEE EDS)"--T.p.

Details

• NCID: BA19225892
• ISBN:
  • 4900526053
• Country Code: ja
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Tokyo
• Pages/Volumes: 442 p.
• Size: 31 cm
• Parent Bibliography ID:
  • BA06755995