Chemical surface preparation, passivation, and cleaning for semiconductor growth and processing : symposium held April 27-29, 1992, San Francisco, California, U.S.A.

Author(s)

• Nemanich, R. J. (Robert J.)

Bibliographic Information

Chemical surface preparation, passivation, and cleaning for semiconductor growth and processing : symposium held April 27-29, 1992, San Francisco, California, U.S.A.

editors, Robert J. Nemanich ... [et. al.]

（Materials Research Society symposium proceedings, v. 259）

Materials Research Society, c1992

Note

Includes bibliographical references and indexes

Details

• NCID: BA19373448
• ISBN:
  • 1558991549
• LCCN: 92026767
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Pittsburgh, Pa.
• Pages/Volumes: xiii, 529 p.
• Size: 24 cm
• Classification:
  • LCC : TK7871.85
  • DC20 : 621.3815/2
  • NDC7 : 549.8
• Subject Headings:
  • LCSH : Semiconductors -- Congresses
  • LCSH : Crystal growth -- Congresses
  • LCSH : Surface preparation -- Congresses
• Parent Bibliography ID:
  • BA00013775