Advanced metallization and processing for semiconductor devices and circuits--II : symposium held April 27-May 1, 1992, San Francisco, California, U.S.A.

著者

• Katz, Avishay

書誌事項

Advanced metallization and processing for semiconductor devices and circuits--II : symposium held April 27-May 1, 1992, San Francisco, California, U.S.A.

editors, Avishay Katz ... [et al.]

（Materials Research Society symposium proceedings, v. 260）

Materials Research Society, c1992

注記

Includes bibliographical references and indexes

詳細情報

• NII書誌ID(NCID): BA19373517
• ISBN:
  • 1558991557
• LCCN: 92026614
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Pittsburgh, Pa.
• ページ数/冊数: xvii, 965 p.
• 大きさ: 24 cm
• 分類:
  • LCC : TK7871.99.C65
  • DC20 : 621.3815/2
• 件名:
  • LCSH : Compound semiconductors -- Design and construction -- Congresses
  • LCSH : Thin films -- Congresses
  • LCSH : Vapor-plating -- Congresses
  • LCSH : Metallic films -- Congresses
• 親書誌ID:
  • BA00013775