書誌事項

Crucial issues in semiconductor materials and processing technologies

edited by S. Coffa ... [et al.]

(NATO ASI series, Series E . Applied sciences ; vol. 222)

Kluwer Academic Publishers, c1992

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注記

"Published in cooperation with NATO Scientific Affairs Division."

"Proceedings of the NATO Advanced Study Institute on Semiconductor Materials and Processing Technologies, Erice, Italy, 1-13 July 1991"--T.p. verso

Includes bibliographical references and index

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