Proceedings of the Symposium on Contamination Control and Defect Reduction in Semiconductor Manufacturing I

Author(s)

• Schmidt, Dennis N.
• Electrochemical Society. Electronics Division
• Electrochemical Society. Dielectric Science and Technology Division

Bibliographic Information

Proceedings of the Symposium on Contamination Control and Defect Reduction in Semiconductor Manufacturing I

edited by Dennis N. Schmidt, assistant editors, David Reedy, Alex Schwarz ; Electronics and Dielectric Science and Technology Divisions

（Proceedings / [Electrochemical Society], v. 92-21）

Electrochemical Society, c1992

Note

Includes bibliographical references and index

Details

• NCID: BA19556991
• ISBN:
  • 156677022X
• LCCN: 92073946
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Pennington, N.J.
• Pages/Volumes: x, 501 p.
• Size: 23 cm
• Parent Bibliography ID:
  • BA01323290