Proceedings of the Ninth Symposium on Plasma Processing

Author(s)

• Symposium on Plasma Processing
• Mathad, G. S.
• Hess, Dennis W.
• Electrochemical Society. Dielectric Science and Technology Division
• Electrochemical Society. Electronics Division

Bibliographic Information

Proceedings of the Ninth Symposium on Plasma Processing

edited by G.S. Mathad, D.W. Hess

（Proceedings / [Electrochemical Society], 92-18）

Electrochemical Society, c1992

Other Title

Plasma processing

Note

"Dielectric Science and Technology and Electronics Divisions."

Spine title: Plasma processing

Includes bibliographical references and indexes

Details

• NCID: BA19725126
• ISBN:
  • 1566770203
• LCCN: 92082777
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Pennington, NJ
• Pages/Volumes: xiii, 654 p.
• Size: 23 cm
• Classification:
  • LCC : TK7871.85
  • DC20 : 621.3815/2
• Subject Headings:
  • LCSH : Semiconductors -- Etching -- Congressses
  • LCSH : Plasma etching -- Congresses
• Parent Bibliography ID:
  • BA01323290