TY  - BOOK
AU  - Li, Sheng S.
TI  - Semiconductor physical electronics
PB  - Plenum
PY  - 1993
T2  - Microdevices : physics and fabrication technologies
EP  - xiii, 507 p.
UR  - http://ci.nii.ac.jp/ncid/BA19851801
SN  - 0306441578
ER  -