The physics of micro/nano-fabrication
著者
書誌事項
The physics of micro/nano-fabrication
（Microdevices : physics and fabrication technologies）
Plenum Press, c1992
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注記
Includes bibliographical references and indexes
内容説明・目次
内容説明
In this revised and expanded edition, the authors provide a comprehensive overview of the tools, technologies, and physical models needed to understand, build, and analyze microdevices. Students, specialists within the field, and researchers in related fields will appreciate their unified presentation and extensive references.
目次
1. Preliminary Survey.- 2. Particle Beams: Sources, Optics, and Interactions.- 3. Plasmas: Physics and Chemistry.- 4. Layering Technologies.- 5. Pattern Generation.- 6. Microcharacterization.- 7. Limits to Nanofabrication.- Appendixes.- Author Index.
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