The physics of micro/nano-fabrication

Author(s)

• Brodie, Ivor
• Muray, Julius J.

Bibliographic Information

The physics of micro/nano-fabrication

Ivor Brodie and Julius J. Muray

（Microdevices : physics and fabrication technologies）

Plenum Press, c1992

Note

Includes bibliographical references and indexes

Details

• NCID: BA1990816X
• ISBN:
  • 0306441462
• LCCN: 92028941
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: New York
• Pages/Volumes: xix, 650 p.
• Size: 26 cm
• Classification:
  • LCC : TK7874
  • DC20 : 621.381
• Subject Headings:
  • LCSH : Microelectronics
  • LCSH : Thin-film circuits
• Parent Bibliography ID:
  • BA01301028