Chemical perspectives of microelectric materials III : symposium held November 30-December 3, 1992, Boston, Massachusetts, U.S.A.

著者

• Abernathy, C. R.

書誌事項

Chemical perspectives of microelectric materials III : symposium held November 30-December 3, 1992, Boston, Massachusetts, U.S.A.

editors, C.R. Abernathy ... [et al.]

（Materials Research Society symposium proceedings, v. 282）

Materials Research Society, c1993

注記

Includes bibliographical references and indexes

• NII書誌ID(NCID): BA2007601X
• ISBN:
  • 1558991778
• LCCN: 93020201
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: und
• 出版地: Pittsburgh, Pa.
• ページ数/冊数: xv, 727 p.
• 大きさ: 24 cm
• 分類:
  • LCC : TK7874
  • DC20 : 621.381
• 件名:
  • LCSH : Microelectronics -- Materials -- Congresses
  • LCSH : Semiconductors -- Congresses
  • LCSH : Surface chemistry -- Congresses
• 親書誌ID:
  • BA00013775