Chemical perspectives of microelectric materials III : symposium held November 30-December 3, 1992, Boston, Massachusetts, U.S.A.

著者

• Abernathy, C. R.

書誌事項

Chemical perspectives of microelectric materials III : symposium held November 30-December 3, 1992, Boston, Massachusetts, U.S.A.

editors, C.R. Abernathy ... [et al.]

（Materials Research Society symposium proceedings, v. 282）

Materials Research Society, c1993

注記

Includes bibliographical references and indexes

内容説明・目次

内容説明

The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.

「Nielsen BookData」 より

詳細情報

• NII書誌ID(NCID): BA2007601X
• ISBN:
  • 1558991778
• LCCN: 93020201
• 出版国コード: us
• タイトル言語コード: eng
• 出版地: Pittsburgh, Pa.
• ページ数/冊数: xv, 727 p.
• 大きさ: 24 cm
• 分類:
  • LCC : TK7874
  • DC20 : 621.381
• 件名:
  • LCSH : Microelectronics -- Materials -- Congresses
  • LCSH : Semiconductors -- Congresses
  • LCSH : Surface chemistry -- Congresses
• 親書誌ID:
  • BA00013775