Multicomponent and multilayered thin films for advanced microtechnologies : techniques, fundamentals, and devices

Author(s)

• NATO Advanced Study Institute on Multicomponent and Multilayered Thin Films for Advanced Microtechnologies
• Auciello, Orlando
• Engemann, Jürgen
• North Atlantic Treaty Organization. Scientific Affairs Division

Bibliographic Information

Multicomponent and multilayered thin films for advanced microtechnologies : techniques, fundamentals, and devices

edited by Orlando Auciello and Jürgen Engemann

（NATO ASI series, ser. E . Applied sciences ; v. 234）

Kluwer, c1993

Note

"Proceedings of the NATO Advanced Study Institute on Multicomponent and Multilayered Thin Films for Advanced Microtechnologies, Bad indsheim, Germany, September 21 - October 2, 1992"--T.p. verso

Published in cooperation with NATO Scientific Affairs Division

Includes index

Details

• NCID: BA20386017
• ISBN:
  • 0792322657
• LCCN: 93020488
• Country Code: ne
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Dordrecht ; Boston
• Pages/Volumes: xv, 633 p.
• Size: 25 cm
• Classification:
  • LCC : TK7872.T55
  • DC20 : 621.3815
• Subject Headings:
  • LCSH : Thin film devices -- Congresses
  • LCSH : Thin films -- Congresses
• Parent Bibliography ID:
  • BA00020624