Multicomponent and multilayered thin films for advanced microtechnologies : techniques, fundamentals, and devices

著者

• NATO Advanced Study Institute on Multicomponent and Multilayered Thin Films for Advanced Microtechnologies
• Auciello, Orlando
• Engemann, Jürgen
• North Atlantic Treaty Organization. Scientific Affairs Division

書誌事項

Multicomponent and multilayered thin films for advanced microtechnologies : techniques, fundamentals, and devices

edited by Orlando Auciello and Jürgen Engemann

（NATO ASI series, ser. E . Applied sciences ; v. 234）

Kluwer, c1993

注記

"Proceedings of the NATO Advanced Study Institute on Multicomponent and Multilayered Thin Films for Advanced Microtechnologies, Bad indsheim, Germany, September 21 - October 2, 1992"--T.p. verso

Published in cooperation with NATO Scientific Affairs Division

Includes index

詳細情報

• NII書誌ID(NCID): BA20386017
• ISBN:
  • 0792322657
• LCCN: 93020488
• 出版国コード: ne
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Dordrecht ; Boston
• ページ数/冊数: xv, 633 p.
• 大きさ: 25 cm
• 分類:
  • LCC : TK7872.T55
  • DC20 : 621.3815
• 件名:
  • LCSH : Thin film devices -- Congresses
  • LCSH : Thin films -- Congresses
• 親書誌ID:
  • BA00020624