Electrochemistry of semiconductors and electronics : processes and devices
著者
書誌事項
Electrochemistry of semiconductors and electronics : processes and devices
(Materials science and process technology series)
Noyes Publications, c1992
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注記
Includes bibliographical references and index
内容説明・目次
内容説明
This book is an in-depth review of the electrochemistry of semiconductors and electronic devices. For in the relentless pursuit of faster, more compact devices the limits of materials science are probed, setting ever higher goals for semiconductor purity, crystal uniformity and circuit density. This book reviews and describes possible electrochemical avenues toward each of these goals.
目次
Electrochemical Deposition of SemiconductorsChemical Etching: Principles and ApplicationsElectrochemical Passivation of (Hg, Cd)TePhotoelectrochemical Processing of SemiconductorsPhotoelectrochemical CharacterizationElectrochemical MigrationElectrochemical CapacitorsIndex
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