Tungsten and other refractory metals for VLSI applications III : proceedings of the 1987 workshop held October 7-9, 1987, IBM Thomas J. Watson Research Center, Yorktown Heights, New York, U.S.A.

著者

• Workshop on Tungsten and Other Refractory Metals for VLSI Applications III
• Wells, Victor A.
• McConica, Carol M.
• Materials Research Society

書誌事項

Tungsten and other refractory metals for VLSI applications III : proceedings of the 1987 workshop held October 7-9, 1987, IBM Thomas J. Watson Research Center, Yorktown Heights, New York, U.S.A.

editor, Victor A. Wells ; associate editors, Carol M. McConica ...[et al.]

（Materials Research Society conference proceedings）

Materials Research Society, c1988

注記

Includes bibliography and index

内容説明・目次

内容説明

The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.

「Nielsen BookData」 より

詳細情報

• NII書誌ID(NCID): BA20742202
• ISBN:
  • 0931837847
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Pittsburgh, Pa
• ページ数/冊数: xiii, 428 p.
• 大きさ: 24 cm
• 親書誌ID:
  • BA07468230