Electron beam testing technology

Author(s)

• Thong, John T. L.

Bibliographic Information

Electron beam testing technology

edited by John T.L. Thong

（Microdevices : physics and fabrication technologies）

Plenum Press, c1993

Note

Includes bibliographical references and index

Details

• NCID: BA20783334
• ISBN:
  • 0306443600
• LCCN: 93018555
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: New York
• Pages/Volumes: xvi, 462 p.
• Size: 26 cm
• Classification:
  • LCC : TK7871.85
  • DC20 : 621.3815/48
• Subject Headings:
  • LCSH : Semiconductors -- Testing
  • LCSH : Electron beams -- Industrial applications
  • LCSH : Scanning electron microscopes
• Parent Bibliography ID:
  • BA01301028