The physical basis of ultrahigh vacuum
著者
書誌事項
The physical basis of ultrahigh vacuum
（American Vacuum Society classics）
American Institute of Physics, c1993
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注記
Originally published: London : Chapman and Hall, 1968
Includes bibliographical references (p. [435]-466) and indexes
内容説明・目次
内容説明
Market: Those involved in the design and use of UHV component systems. Written 25 years ago, this book explains both the design and use of UHV systems and components, as well as the underlying physical principles on which the performance of the equipment depends. Because of its close association of these underlying physical principles with the practical problems inherent in UHV equipment, the book retains its value to this day.
目次
Contents: Molecule-Molecule and Molecule-Interactions. Collision Processes in Gases. Interaction of Charged Particles with Surfaces. Interaction of Radiation with Surfaces. Mechanical Properties of Materials at Very Low Pressures. General Considerations of Pressure Measurement. Total Pressure Gauges. Partial Pressure Gauges. Processing Techniques for Ultrahigh Vacuum. Pumps for Ultrahigh Vacuum. Examples of Ultrahigh Vacuum Systems.
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