Introduction to VLSI process engineering

Author(s)

• 化学工学協会 カガク コウガク キョウカイ
• 仲, 勇治 ナカ, ユウジ

Bibliographic Information

Introduction to VLSI process engineering

edited by the Society of Chemical Engineers of Japan [; editor in chief, Yuji Naka]

Chapman & Hall, c1993

English language ed

Other Title

化学技術者のための超LSI技術入門

Note

"The English language edition has been translated from the original Japanese publication Introduction to VLSI processing for chemical engineers, Baifukan c1989" -- T. p. verso

Includes index

Details

• NCID: BA20932401
• ISBN:
  • 0412395509
• LCCN: 92045674
• Country Code: uk
• Title Language Code: eng
• Text Language Code: eng
• Original Language Code: jpn
• Place of Publication: London ; Tokyo
• Pages/Volumes: xiii, 210 p.
• Size: 24 cm
• Classification:
  • LCC : TK7874
  • DC20 : 621.39/5
  • NDC8 : 549.7
• Subject Headings:
  • LCSH : Integrated circuits -- Very large scale integration -- Design and construction
  • LCSH : Manufacturing processes