Silicon processing for the VLSI era

Author(s)

• Wolf, Stanley

Bibliographic Information

Silicon processing for the VLSI era

Stanley Wolf

Lattice Press, c1986-<c1990 >

• cover : v. 1
• v. 1
• v. 2
• v. 2

Note

vol. 1: Process technology. vol. 2: Process integration

Includes bibliographies and indexes

Details

• NCID: BA21071769
• ISBN:
  • 0961672137
  • 0961672145
• LCCN: 86081923
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Sunset Beach, Calif.
• Pages/Volumes: v. <1-2 >
• Size: 25 cm
• Classification:
  • NDC8 : 549.7
  • LCC : TK7874
  • DC19 : 621.381/73
• Subject Headings:
  • LCSH : Integrated circuits -- Very large scale integration
  • LCSH : Silicon