Rapid thermal processing : science and technology

Author(s)

• Fair, Richard B.

Bibliographic Information

Rapid thermal processing : science and technology

edited by Richard B. Fair

Academic Press, c1993

Note

Includes bibliographical references and index

Details

• NCID: BA21128480
• ISBN:
  • 0122476905
• LCCN: 93006882
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Boston
• Pages/Volumes: viii, 430 p.
• Size: 24 cm
• Classification:
  • LCC : TK7871.85
  • DC20 : 621.3815/2
• Subject Headings:
  • LCSH : Semiconductors -- Heat treatment
  • LCSH : Semiconductor doping