Gettering and deffect engineering in semiconductor technology : GADEST '93 : proceedings of the 5th International Autumn Meeting held in Chossewitz, near Frankfurt(Oder), Germany, October 09-14, 1993

Author(s)

• International Autumn Meeting, Gettering and Defect Engineering in Semiconductor Technology
• Grimmeiss, H. G.
• Kittler, M.
• Richter, H.

Bibliographic Information

Gettering and deffect engineering in semiconductor technology : GADEST '93 : proceedings of the 5th International Autumn Meeting held in Chossewitz, near Frankfurt(Oder), Germany, October 09-14, 1993

editors, H.G. Grimmeiss, M. Kittler and H. Richter

（Diffusion and defect data : solid state data, Pt. B . Solid state phenomena ; v. 32 & 33）

SciTec Publications, 1993

Note

Includes bibliographical references and index

Details

• NCID: BA21152678
• ISBN:
  • 3908450004
• Country Code: sz
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Untermuhleweg, Switzerland
• Pages/Volumes: xvii,630 p.
• Size: 25 cm
• Parent Bibliography ID:
  • BA07841800