Gettering and deffect engineering in semiconductor technology : GADEST '93 : proceedings of the 5th International Autumn Meeting held in Chossewitz, near Frankfurt(Oder), Germany, October 09-14, 1993

著者

• International Autumn Meeting, Gettering and Defect Engineering in Semiconductor Technology
• Grimmeiss, H. G.
• Kittler, M.
• Richter, H.

書誌事項

Gettering and deffect engineering in semiconductor technology : GADEST '93 : proceedings of the 5th International Autumn Meeting held in Chossewitz, near Frankfurt(Oder), Germany, October 09-14, 1993

editors, H.G. Grimmeiss, M. Kittler and H. Richter

（Diffusion and defect data : solid state data, Pt. B . Solid state phenomena ; v. 32 & 33）

SciTec Publications, 1993

注記

Includes bibliographical references and index

詳細情報

• NII書誌ID(NCID): BA21152678
• ISBN:
  • 3908450004
• 出版国コード: sz
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Untermuhleweg, Switzerland
• ページ数/冊数: xvii,630 p.
• 大きさ: 25 cm
• 親書誌ID:
  • BA07841800