Microcircuit Engineering 91 : proceedings of the International Conference on Microlithography, September 17-19, 1991, Rome, Italy

Author(s)

• Microcircuit Engineering 91 (1991 : Rome, Italy)
• Tucciarone, A.
• Paoletti, A.
• Paroli, P.

Bibliographic Information

Microcircuit Engineering 91 : proceedings of the International Conference on Microlithography, September 17-19, 1991, Rome, Italy

edited by A. Tucciarone, A. Paoletti, P. Paroli

Elsevier, c1992

Note

"Reprinted from Microelectronic engineering 17 (1992)."

Includes bibliographies and index

Details

• NCID: BA21221362
• ISBN:
  • 0444895094
• Country Code: ne
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Amsterdam
• Pages/Volumes: xvii, 581 p.
• Size: 27 cm
• Classification:
  • LCC : TK7874
  • DC20 : 621.381/531
• Subject Headings:
  • LCSH : Microelectronics -- Congresses
  • LCSH : Microlithography -- Congresses