Microcircuit Engineering 91 : proceedings of the International Conference on Microlithography, September 17-19, 1991, Rome, Italy

著者

• Microcircuit Engineering 91 (1991 : Rome, Italy)
• Tucciarone, A.
• Paoletti, A.
• Paroli, P.

書誌事項

Microcircuit Engineering 91 : proceedings of the International Conference on Microlithography, September 17-19, 1991, Rome, Italy

edited by A. Tucciarone, A. Paoletti, P. Paroli

Elsevier, c1992

注記

"Reprinted from Microelectronic engineering 17 (1992)."

Includes bibliographies and index

詳細情報

• NII書誌ID(NCID): BA21221362
• ISBN:
  • 0444895094
• 出版国コード: ne
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Amsterdam
• ページ数/冊数: xvii, 581 p.
• 大きさ: 27 cm
• 分類:
  • LCC : TK7874
  • DC20 : 621.381/531
• 件名:
  • LCSH : Microelectronics -- Congresses
  • LCSH : Microlithography -- Congresses