Materials aspects of x-ray lithography : symposium held April 12-14, 1993, San Francisco, California, U.S.A.
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Materials aspects of x-ray lithography : symposium held April 12-14, 1993, San Francisco, California, U.S.A.
（Materials Research Society symposium proceedings, v. 306）
Materials Research Society, 1993
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Papers based on the symposium on Materials Aspects of X-Ray Lithography, held in San Francisco, California, on April 12-14, 1993
Includes bibliographical references and indexes