Single chamber processing : proceedings of the joint session on single chamber processing : requirements and challenges of the 1992 E-MRS Spring Meeting Conference, Strasbourg, France, June 2-5, 1992

著者

• European Materials Research Society. Meeting (1992 : Strasbourg, France)
• Nissim, Yves I.
• Katz, Avishay

書誌事項

Single chamber processing : proceedings of the joint session on single chamber processing : requirements and challenges of the 1992 E-MRS Spring Meeting Conference, Strasbourg, France, June 2-5, 1992

edited by Yves I. Nissim, Avishay Katz

（European Materials Research Society symposia proceedings, v. 37）

North-Holland, 1993

注記

Includes bibliographical references

詳細情報

• NII書誌ID(NCID): BA21392252
• ISBN:
  • 0444899154
• LCCN: 92042556
• 出版国コード: ne
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Amsterdam ; New York
• ページ数/冊数: x, 162 p.
• 大きさ: 29 cm
• 分類:
  • LCC : TK7871.85
  • DC20 : 621.3815
• 件名:
  • LCSH : Semiconductors -- Design and construction -- Congresses
  • LCSH : Vacuum technology -- Congresses
• 親書誌ID:
  • BA07004036