Proceedings of the Symposium on Highly Selective Dry Etching and Damage Control

著者

• Symposium on Highly Selective Dry Etching and Damage Control
• Mathad, G. S.
• Horiike, Y.

書誌事項

Proceedings of the Symposium on Highly Selective Dry Etching and Damage Control

edited by G.S. Mathad, Y. Horiike ; [sponsored by the] Dielectric Sicence and Technology and Electronics Divisio

（Proceedings / [Electrochemical Society], v. 93-21）

Electrochemical Society, c1993

注記

Includes bibliographical references and indexes

詳細情報

• NII書誌ID(NCID): BA21435796
• ISBN:
  • 1566770661
• LCCN: 93070068
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Pennington, NJ
• ページ数/冊数: x, 438 p.
• 大きさ: 23 cm
• 親書誌ID:
  • BA01323290