Proceedings of the Symposium on Highly Selective Dry Etching and Damage Control

Author(s)

• Symposium on Highly Selective Dry Etching and Damage Control
• Mathad, G. S.
• Horiike, Y.

Bibliographic Information

Proceedings of the Symposium on Highly Selective Dry Etching and Damage Control

edited by G.S. Mathad, Y. Horiike ; [sponsored by the] Dielectric Sicence and Technology and Electronics Divisio

（Proceedings / [Electrochemical Society], v. 93-21）

Electrochemical Society, c1993

Note

Includes bibliographical references and indexes

Details

• NCID: BA21435796
• ISBN:
  • 1566770661
• LCCN: 93070068
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Pennington, NJ
• Pages/Volumes: x, 438 p.
• Size: 23 cm
• Parent Bibliography ID:
  • BA01323290