Trends in ion implantation
著者
書誌事項
Trends in ion implantation
(Solid state phenomena, v. 27)
Trans Tech Publications, c1992
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内容説明・目次
内容説明
The book reviews and discusses some important new aspects of the field of ion implantation.
目次
Molecular Dynamics Simulation Studies of Basic Aspects of Particle-Solid Interaction Phenomena
Recent Developments of Molecular Dynamics Simulations in Ion Implantation and in Material Processing
Low Energy Ion-Surface Interactions during Epitaxial Growth
The Interaction of Slow Ions with Surfaces
Optical Waveguides Formed by Ion Implantation
Ion Implantation of Polymers for Electrical Conductivity Enhancement
Moessbauer Studies of Ion Implanted Systems
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