Handbook of sputter deposition technology : principles, technology, and applications

著者

    • Wasa, Kiyotaka
    • Hayakawa, Shigeru

書誌事項

Handbook of sputter deposition technology : principles, technology, and applications

by Kiyotaka Wasa and Shigeru Hayakawa

（Materials science and process technology series）

Noyes Publications, c1992

大学図書館所蔵 件 / 全10件

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注記

Includes bibliographical references and index

内容説明・目次

内容説明

A concise, comprehensive overview of sputter deposition technologyua key technology for materials research in the next decade. Cathode sputtering is widely used in the microelectronics industry for silicon integrated circuit production and for metallurgical coatings. High temperature superconductors can be synthesized with sputtering under non-equilibrium conditions. Diamond films and ferroelectric materials are other applications.

目次

Thin Film Materials and Devices Thin Film Processes Sputtering Phenomena Sputtering Systems Deposition of Compound Thin Films Microfabrication by Sputtering Future Directions

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