Control of hydrocarbon radicals and film deposition by using an RF whistler wave discharge

Author(s)

Bibliographic Information

Control of hydrocarbon radicals and film deposition by using an RF whistler wave discharge

Tetsu Mieno, Tatsuo Shoji, Kiyoshi Kadota

（PSC, 15）

Plasma Science Center, Nagoya University, 1991

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Note

Cover title

"Received--September 25, 1991"--Cover

Includes bibliographical references (p. 11)

Related Books： 1-1 of 1

  • PSC

    Plasma Science Center, Nagoya University

Details

  • NCID
    BA21909223
  • Country Code
    ja
  • Title Language Code
    eng
  • Text Language Code
    eng
  • Place of Publication
    Nagoya
  • Pages/Volumes
    13, [12] p.
  • Size
    30 cm
  • Parent Bibliography ID
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