Control of hydrocarbon radicals and film deposition by using an RF whistler wave discharge
著者
書誌事項
Control of hydrocarbon radicals and film deposition by using an RF whistler wave discharge
（PSC, 15）
Plasma Science Center, Nagoya University, 1991
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注記
Cover title
"Received--September 25, 1991"--Cover
Includes bibliographical references (p. 11)