Spectroscopic characterization techniques for semiconductor technology IV : 25-26 March 1992, Somerset, New Jersey

著者

• Glembocki, Orest J.
• Society of Photo-optical Instrumentation Engineers

書誌事項

Spectroscopic characterization techniques for semiconductor technology IV : 25-26 March 1992, Somerset, New Jersey

Orest J. Glembocki, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 1678）

SPIE, c1992

注記

Includes bibliographical references and index

詳細情報

• NII書誌ID(NCID): BA2262849X
• ISBN:
  • 0819408395
• LCCN: 92081135
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Bellingham, Wash.
• ページ数/冊数: ix, 308 p.
• 大きさ: 28 cm
• 分類:
  • LCC : TK7871.85
  • DC20 : 621.381/52
• 件名:
  • LCSH : Semiconductors -- Testing -- Congresses
  • LCSH : Spectrum analysis -- Congresses
• 親書誌ID:
  • BA0022700X