Spectroscopic characterization techniques for semiconductor technology IV : 25-26 March 1992, Somerset, New Jersey

Author(s)

• Glembocki, Orest J.
• Society of Photo-optical Instrumentation Engineers

Bibliographic Information

Spectroscopic characterization techniques for semiconductor technology IV : 25-26 March 1992, Somerset, New Jersey

Orest J. Glembocki, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 1678）

SPIE, c1992

Note

Includes bibliographical references and index

Details

• NCID: BA2262849X
• ISBN:
  • 0819408395
• LCCN: 92081135
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Bellingham, Wash.
• Pages/Volumes: ix, 308 p.
• Size: 28 cm
• Classification:
  • LCC : TK7871.85
  • DC20 : 621.381/52
• Subject Headings:
  • LCSH : Semiconductors -- Testing -- Congresses
  • LCSH : Spectrum analysis -- Congresses
• Parent Bibliography ID:
  • BA0022700X