Vacuum methods in electron microscopy
著者
書誌事項
Vacuum methods in electron microscopy
（Practical methods in electron microscopy / edited by Audrey M. Glauert, v. 15）
Portland Press, c1994
- :pbk.
- :hbk.
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注記
Includes bibliographical references and index
内容説明・目次
内容説明
This study provides full details and advice on the understanding and practical operation of the vacuum systems found in electron microscope laboratories. The importance of the correct functioning of these systems is too frequently underestimated, with the result that electron microscopes and other vacuum equipment, such as freeze-etching units and sputter coaters, give less than their optimum performance. It provides all the information necessary to help scientists, technicians and engineers operate and service vacuum systems correctly, both in electron microscope units and in other laboratories. Detailed and fully illustrated descriptions are given of basic vacuum processes, of the functioning of vacuum gauges and pumps, from simple rotary pumps to the latest bulk getter and cryogenic pumps, and of the correct operating procedures for different types of vacuum systems. The book finishes with a chapter describing the procedures for detecting and repairing leaks in vacuum systems.
目次
- Vacuum and its characteristics
- the evacuation process
- vacuum pumps
- rough vacuum pumps
- oil diffusion pumps
- turbomolecular and molecular drag pumps
- ion, sublimation, and bulk getter pumps
- cryogenic pumps
- practical vacuum systems
- vacuum leaks, seals and greases. Appendices.
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