Sensor technology and devices
著者
書誌事項
Sensor technology and devices
Artech House, c1994
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注記
Includes bibliographical references and index
内容説明・目次
内容説明
"A results-oriented book. Quality line drawings, lucid photography, and informative graphs are used generously...The theoretical rigor of each chapter amply supports the real-world design examples that follow". -- Sensors Magazine "One of the few sources to offer such comprehensive coverage". -- IEEE Electrical Insulation
目次
Modeling and Simulation of Microsensors and Actuators. Bulk Micromachining Technology. Surface Micromachining Technology. Silicon Direct Wafer Bonding. Packaging for Sensors. Magnetic Field Sensors Based on Lateral Magnetotransistors. Thermal Sensors. Planar Silicon Photosensors. Charged Coupled Devices. Sensors for the Automotive Industry. Signal Processing for Micromachined Sensors. Controlled Oscillators and their Applicability to Sensors.
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