Proceedings of the Symposium on Contamination Control and Defect Reduction in Semiconductor Manufacturing II

Author(s)

• Novak, R.
• Electrochemical Society. Electronics Division
• Electrochemical Society. Dielectric Science and Technology Division

Bibliographic Information

Proceedings of the Symposium on Contamination Control and Defect Reduction in Semiconductor Manufacturing II

edited by R. Novak ... [et al.] ; [sponsored by] the Electrochemical Society. Electronics and Dielectric Science and Technology Divisions

（Proceedings / [Electrochemical Society], v. 94-3）

The Electrochemical Society, c1994

Note

Includes bibliographies and index

"held at the Electrochemical Spring Meeting May 16-22, 1993, Honolulu, Hawaii"

Details

• NCID: BA23030321
• ISBN:
  • 1566770653
• LCCN: 93070066
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Pennington, NJ
• Pages/Volumes: ix, 353 p.
• Size: 23 cm
• Parent Bibliography ID:
  • BA01323290