Proceedings of the Symposium on Contamination Control and Defect Reduction in Semiconductor Manufacturing II

著者

• Novak, R.
• Electrochemical Society. Electronics Division
• Electrochemical Society. Dielectric Science and Technology Division

書誌事項

Proceedings of the Symposium on Contamination Control and Defect Reduction in Semiconductor Manufacturing II

edited by R. Novak ... [et al.] ; [sponsored by] the Electrochemical Society. Electronics and Dielectric Science and Technology Divisions

（Proceedings / [Electrochemical Society], v. 94-3）

The Electrochemical Society, c1994

注記

Includes bibliographies and index

"held at the Electrochemical Spring Meeting May 16-22, 1993, Honolulu, Hawaii"

詳細情報

• NII書誌ID(NCID): BA23030321
• ISBN:
  • 1566770653
• LCCN: 93070066
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Pennington, NJ
• ページ数/冊数: ix, 353 p.
• 大きさ: 23 cm
• 親書誌ID:
  • BA01323290