Proceedings of the Symposium on Contamination Control and Defect Reduction in Semiconductor Manufacturing III

著者

• Schmidt, Dennis N.
• Electrochemical Society. Electronics Division

書誌事項

Proceedings of the Symposium on Contamination Control and Defect Reduction in Semiconductor Manufacturing III

edited by D.N. Schmidt ; [sponsored by] the Electrochemical Society. Electronics Division

（Proceedings / [Electrochemical Society], v. 94-9）

The Electrochemical Society, c1994

注記

Includes bibliographies and index

"held May 23-27, 1994 in San Francisco, CA"

詳細情報

• NII書誌ID(NCID): BA23030773
• ISBN:
  • 1566770416
• LCCN: 94070841
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Pennington, NJ
• ページ数/冊数: ix, 433 p.
• 大きさ: 24 cm
• 親書誌ID:
  • BA01323290