Ion implantation

Author(s)

• International Conference on Ion Implantation in Semiconductors
• Eisen, Fred H.
• Chadderton, Lewis T.

Bibliographic Information

Ion implantation

edited by Fred H. Eisen [and] Lewis T. Chadderton

Gordon and Breach Science Publishers, c1971

Note

1st International Conference on Ion Implantation in Semiconductors held in Thousand Oaks, California, May 4-9th, 1970

Includes bibliographical references

Details

• NCID: BA2311173X
• ISBN:
  • 0677150008
• LCCN: 71153515
• Country Code: uk
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: London ; New York
• Pages/Volumes: xii, 464 p.
• Size: 27 cm
• Classification:
  • NDC8 : 549.8
  • NDC7 : 427.15
  • LCC : TK7871.85
  • DC : 621.3815/2
• Subject Headings:
  • LCSH : Ion implantation -- Congresses
  • LCSH : Semiconductors -- Congresses