Ion implantation

著者

• International Conference on Ion Implantation in Semiconductors
• Eisen, Fred H.
• Chadderton, Lewis T.

書誌事項

Ion implantation

edited by Fred H. Eisen [and] Lewis T. Chadderton

Gordon and Breach Science Publishers, c1971

注記

1st International Conference on Ion Implantation in Semiconductors held in Thousand Oaks, California, May 4-9th, 1970

Includes bibliographical references

• NII書誌ID(NCID): BA2311173X
• ISBN:
  • 0677150008
• LCCN: 71153515
• 出版国コード: uk
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: London ; New York
• ページ数/冊数: xii, 464 p.
• 大きさ: 27 cm
• 分類:
  • NDC8 : 549.8
  • NDC7 : 427.15
  • LCC : TK7871.85
  • DC : 621.3815/2
• 件名:
  • LCSH : Ion implantation -- Congresses
  • LCSH : Semiconductors -- Congresses