Diagnostic techniques for semiconductor materials processing : Symposium held November 29-December 2, 1993, Boston, Massachusetts, U.S.A.

Author(s)

• Glembocki, Orest J.

Bibliographic Information

Diagnostic techniques for semiconductor materials processing : Symposium held November 29-December 2, 1993, Boston, Massachusetts, U.S.A.

editors, O.J. Glembocki ... [et al.]

（Materials Research Society symposium proceedings, v. 324）

Materials Research Society, c1994

Note

Includes bibliographical references and index

Details

• NCID: BA23153172
• ISBN:
  • 1558992235
• LCCN: 94020397
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Pittsburgh
• Pages/Volumes: xv, 505 p.
• Size: 24 cm
• Parent Bibliography ID:
  • BA00013775