Diagnostic techniques for semiconductor materials processing : Symposium held November 29-December 2, 1993, Boston, Massachusetts, U.S.A.

著者

• Glembocki, Orest J.

書誌事項

Diagnostic techniques for semiconductor materials processing : Symposium held November 29-December 2, 1993, Boston, Massachusetts, U.S.A.

editors, O.J. Glembocki ... [et al.]

（Materials Research Society symposium proceedings, v. 324）

Materials Research Society, c1994

注記

Includes bibliographical references and index

内容説明・目次

内容説明

The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.

「Nielsen BookData」 より

• NII書誌ID(NCID): BA23153172
• ISBN:
  • 1558992235
• LCCN: 94020397
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Pittsburgh
• ページ数/冊数: xv, 505 p.
• 大きさ: 24 cm
• 親書誌ID:
  • BA00013775