Gas-phase and surface chemistry in electronic materials processing : symposium held November 29-December 2, 1993, Boston, Massachusetts, U.S.A.
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書誌事項
Gas-phase and surface chemistry in electronic materials processing : symposium held November 29-December 2, 1993, Boston, Massachusetts, U.S.A.
（Materials Research Society symposium proceedings, v. 334）
Materials Research Society, c1994
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Sponsors: Army Research Office, Office of Naval Research
Includes bibliographical references and index