Gas-phase and surface chemistry in electronic materials processing : symposium held November 29-December 2, 1993, Boston, Massachusetts, U.S.A.

著者

• Mountziaris, Triantafillos John
• United States. Army Research Office
• United States. Office of Naval Research

書誌事項

Gas-phase and surface chemistry in electronic materials processing : symposium held November 29-December 2, 1993, Boston, Massachusetts, U.S.A.

editors, T.J. Mountziaris ... [et al.]

（Materials Research Society symposium proceedings, v. 334）

Materials Research Society, c1994

注記

Sponsors: Army Research Office, Office of Naval Research

Includes bibliographical references and index

内容説明・目次

内容説明

The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.

「Nielsen BookData」 より

• NII書誌ID(NCID): BA23154765
• ISBN:
  • 1558992332
• LCCN: 94009632
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Pittsburgh, PA
• ページ数/冊数: xv, 556 p.
• 大きさ: 24 cm
• 分類:
  • LCC : TK7871
  • DC20 : 621.3815/2
• 件名:
  • LCSH : Electronic materials -- Surfaces -- Congresses
  • LCSH : Surface chemistry -- Congresses
• 親書誌ID:
  • BA00013775