Gas-phase and surface chemistry in electronic materials processing : symposium held November 29-December 2, 1993, Boston, Massachusetts, U.S.A.
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Bibliographic Information
Gas-phase and surface chemistry in electronic materials processing : symposium held November 29-December 2, 1993, Boston, Massachusetts, U.S.A.
（Materials Research Society symposium proceedings, v. 334）
Materials Research Society, c1994
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Sponsors: Army Research Office, Office of Naval Research
Includes bibliographical references and index
Description and Table of Contents
Description
The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
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