Proceedings of the tenth symposium on plasma processing

著者

• Electrochemical Society. Dielectric Science and Technology Division
• American Ceramic Society. Electronics Division. Fall Meeting
• Mathad, G. S.
• Hess, Dennis W.

書誌事項

Proceedings of the tenth symposium on plasma processing

edited by G.S. Mathad, D.W. Hess ; [sponsored by] Dielectric Science and Technology and electronics Divisions, the Electrochemical Society

（Proceedings / [Electrochemical Society], v. 94-20）

the Electrochemical Society, Inc., c1994

注記

Includes bibliographical references and index

詳細情報

• NII書誌ID(NCID): BA23496328
• ISBN:
  • 1566770777
• LCCN: 94070852
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Pennington, NJ
• ページ数/冊数: xi, 606 p.
• 大きさ: 23 cm
• 親書誌ID:
  • BA01323290