Proceedings of the tenth symposium on plasma processing

Author(s)

• Electrochemical Society. Dielectric Science and Technology Division
• American Ceramic Society. Electronics Division. Fall Meeting
• Mathad, G. S.
• Hess, Dennis W.

Bibliographic Information

Proceedings of the tenth symposium on plasma processing

edited by G.S. Mathad, D.W. Hess ; [sponsored by] Dielectric Science and Technology and electronics Divisions, the Electrochemical Society

（Proceedings / [Electrochemical Society], v. 94-20）

the Electrochemical Society, Inc., c1994

Note

Includes bibliographical references and index

• NCID: BA23496328
• ISBN:
  • 1566770777
• LCCN: 94070852
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Pennington, NJ
• Pages/Volumes: xi, 606 p.
• Size: 23 cm
• Parent Bibliography ID:
  • BA01323290