Bibliographic Information

Proceedings of the tenth symposium on plasma processing

edited by G.S. Mathad, D.W. Hess ; [sponsored by] Dielectric Science and Technology and electronics Divisions, the Electrochemical Society

(Proceedings / [Electrochemical Society], v. 94-20)

the Electrochemical Society, Inc., c1994

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Note

Includes bibliographical references and index

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  • Proceedings

    [Electrochemical Society]

    Electrochemical Society

Details

  • NCID
    BA23496328
  • ISBN
    • 1566770777
  • LCCN
    94070852
  • Country Code
    us
  • Title Language Code
    eng
  • Text Language Code
    eng
  • Place of Publication
    Pennington, NJ
  • Pages/Volumes
    xi, 606 p.
  • Size
    23 cm
  • Parent Bibliography ID
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