Polymers for microelectronics : resists and dielectrics

Author(s)

• Thompson, L. F.
• Willson, C. G. (C. Grant)
• 田川, 精一 タガワ, セイイチ
• American Chemical Society. Division of Polymeric Materials : Science and Engineering
• American Chemical Society. Meeting

Bibliographic Information

Polymers for microelectronics : resists and dielectrics

Larry F. Thompson, editor, C. Grant Willson, editor, Seiichi Tagawa, editor

（ACS symposium series, 537）

American Chemical Society, 1994

Note

"Developed from a symposium sponsored by the Division of Polymeri Materials: Science and Engineering, Inc., of the American Chemical Society and the Society of Polymer Science, Japan, at the 203rd National Meeting of the American Chemical Society, San Francisco, California, April 5-10, 1992."

Includes bibliographical references and indexes

Details

• NCID: BA23564381
• ISBN:
  • 0841227217
• LCCN: 93033955
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Washington, DC
• Pages/Volumes: xii, 571 p.
• Size: 24 cm
• Classification:
  • LCC : TK7871.15.P6
  • DC20 : 621.3815/31
• Subject Headings:
  • LCSH : Microelectronics -- Materials -- Congresses
  • LCSH : Polymers -- Congresses
• Parent Bibliography ID:
  • BA00073096