Laser-assisted microtechnology
著者
書誌事項
Laser-assisted microtechnology
（Springer series in materials science, v. 19）
Springer-Verlag, c1994
- : gw
- : us
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注記
Includes bibliographical references and index
内容説明・目次
内容説明
Laser-Assisted Microtechnology deals with laser applications to a wide variety of problems in microelectronic design and fabrication. It covers micromachining of thin films, microprocessing of materials, maskless laser micropatterning and laser-assisted synthesis of thin systems. The monograph describes fundamental aspects and practical details of the technological processes as well as the optimum conditions for their realization.
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