Laser-assisted microtechnology

Author(s)

• Metev, S. M. (Simeon Metodiev)
• Veĭko, V. P. (Vadim Pavlovich)

Bibliographic Information

Laser-assisted microtechnology

Simeon M. Metev, Vadim P. Veiko

（Springer series in materials science, v. 19）

Springer-Verlag, c1994

• : gw
• : us

Note

Includes bibliographical references and index

Details

• NCID: BA23652569
• ISBN:
  • 3540539255
  • 0387539255
• LCCN: 94025834
• Country Code: gw
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Berlin ; New York
• Pages/Volumes: x, 240 p.
• Size: 24 cm
• Classification:
  • LCC : TK7836
  • DC20 : 621.3815/2/028
• Subject Headings:
  • LCSH : Electronic industries -- Technological innovations
  • LCSH : Lasers -- Industrial applications
  • LCSH : Manufacturing processes
  • LCSH : Electronic circuit design
  • LCSH : Thin film devices -- Design and construction
• Parent Bibliography ID:
  • BA00476831