Proceedings of the third Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films

著者

• Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films
• Kapoor, Vikram J.
• Brown, William D.
• Electrochemical Society. Dielectric Science and Technology Division
• Electrochemical Society. Electronics Division

書誌事項

Proceedings of the third Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films

editors, V.J. Kapoor, W.D. Brown ; Dielectric Science and Technology and Electronics Divisions

（Proceedings / [Electrochemical Society], v. 94-16）

Electrochemical Society, c1994

注記

Includes bibliographical references

詳細情報

• NII書誌ID(NCID): BA23818650
• ISBN:
  • 1566770483
• LCCN: 94070848
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Pennington, NJ
• ページ数/冊数: xiii, 625 p.
• 大きさ: 23 cm
• 分類:
  • LCC : TK7872.T55
  • DC20 : 621.381/52
• 件名:
  • LCSH : Thin film devices -- Congresses
  • LCSH : Electric insulators and insulation -- Thin films -- Congresses
  • LCSH : Silicon nitride -- Congresses
  • LCSH : Silicon dioxide -- Congresses
• 親書誌ID:
  • BA01323290