Technological advances in micro and submicro photofabrication imagery : [seminar], August 21-23, 1974, San Diego, California

著者

• Graf, J. M.
• Converse, William

書誌事項

Technological advances in micro and submicro photofabrication imagery : [seminar], August 21-23, 1974, San Diego, California

editors, J. M. Graf, William Converse

（Proceedings of the Society of Photo-Optical Instrumentation Engineers, v. 55）

Society of Photo-optical Instrumentation Engineers, c1975

注記

Page 136 blank for "Notes."

Includes bibliographical references

• NII書誌ID(NCID): BA23910460
• LCCN: 76357435
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Palos Verdes Estates, Calif.
• ページ数/冊数: viii, 136 p.
• 大きさ: 28 cm
• 分類:
  • LCC : TK7874
  • DC : 621.381/7
• 件名:
  • LCSH : Microelectronics -- Congresses
  • LCSH : Masks (Electronics) -- Congresses
• 親書誌ID:
  • BA0118856X